Thin Film Products Sputtering Targets for Optical Products
In optical product applications such as displays and optical discs, precious metal materials play an important role in interconnects, electrodes, reflective layers, and barrier layers.
The excellent electrical conductivity, corrosion resistance, and optical properties of precious metals contribute to the realization of high-resolution, highly reliable devices.
Furuya Metal manufactures a wide range of precious metal sputtering targets, including its proprietary silver alloy, APC.
Materials by application
| OLED | APC、Ag |
|---|---|
| LED | APC、Ru、Pt |
| Low-E glass/films | APC、Ag |
| Optical discs | APC |
| Electrochromic mirrors | Ir、Ru |
APC series
APC is a proprietary silver alloy developed by Furuya Metal. While retaining silver’s outstanding properties, including low electrical resistivity and high reflectivity, APC offers significantly improved environmental resistance and heat resistance.
Even after heat treatment during manufacturing processes or under demanding operating conditions, APC maintains properties comparable to that of pure silver.
APC is used in a wide range of applications, including touchscreen (touch panel) interconnects, reflective electrodes for OLEDs and reflective LCDs, electrodes for LEDs and crystal oscillators, and metallization layers for power semiconductors.
In recent years, APC has also attracted increasing attention as a potential alternative to gold electrodes, helping reduce material costs.
Furuya Metal develops and manufactures a broad lineup of APC materials and provides optimal material solutions tailored to each application.
Heat-resistant silver alloy (APC-TR)
APC-TR is Furuya Metal’s standard silver alloy, developed to significantly enhance the heat resistance, reflectivity, and low electrical resistivity of silver.
It also offers excellent adhesion to glass, electromigration resistance, and etchability.
APC-TR is used in a wide range of applications, including reflective films, electrodes, and interconnects.
High-reflectivity silver alloy (APC-AR)
APC-AR is a high-reflectivity silver alloy developed to meet the requirements of display applications such as OLEDs.
The APC-AR series offers even higher reflectivity than APC-TR while providing superior heat resistance compared with pure silver.
Ruthenium Reflective Films for Deep Ultraviolet Applications
In the ultraviolet (UV) and deep ultraviolet (DUV) wavelength ranges, ruthenium offers higher reflectivity than many other metallic materials.
In addition to manufacturing and supplying ruthenium sputtering targets and evaporation materials, Furuya Metal also offers ruthenium thin film deposition through its contract deposition services.
We also develop the APC series of silver alloys with properties tailored to specific applications.
Contract Thin Film Deposition Services
Physical properties of RuMaterial property
| Materials | Ru | Al | Ir | Rh |
|---|---|---|---|---|
| Melting point | 2250℃ | 660℃ | 2443℃ | 1966℃ |
| Electrical resistivity | 7.7μΩ㎝ | 2.67μΩ㎝ | 5.1μΩ㎝ | 4.7μΩ㎝ |
| Work function | 4.52 | 4.08 | 5.27 | 4.80 |
| Hydrochloric acid resistance | ◯ | ✗ | ◯ | ◯ |
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